The High-Efficiency Design Method for Capacitive MEMS Accelerometer
Wen Liu,
Tianlong Zhao,
Zhiyuan He
et al.
Abstract:In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design method, an orthogonal design and the particle swarm optimization (PSO) algorithm are introduced to improve the design efficiency. The whole process includes a finite e… Show more
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