The heat dissipation path of self-heating effects for the SOI MOSFET by considering the BOX layer and the TiN barrier layer
Y F Li,
L D Xu,
T Ni
et al.
Abstract:Silicon-on-insulator (SOI) devices are widely utilized in high-performance and high-reliability fields, facing challenges from self-heating effects (SHE). However, the research on heat dissipation path closely related to SHE remains incomplete. This paper initiates an in-depth analysis of thermal effects involving the fine structures within heat dissipation path, using ultrafast pulse I-V measurements combined with thermal simulations. It is found in practical processes that the SHE of scaled-down devices decr… Show more
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