2009
DOI: 10.1016/j.apsusc.2009.04.047
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The growth of manganese layers on Si(100) at room temperature: A photoelectron spectroscopy study

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Cited by 18 publications
(8 citation statements)
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“…The main problem here is similar to that arising in the case of deposition of Mn layers onto the Si surface, when the formation of a silicide ultrathin interface at the boundary between the Si substrate and the Mn layer destroys the magnetic overlayer homogeneity. [19][20][21][22] Nevertheless, under suitable growth conditions, Mn can form a two-dimensional row-like structure, which could be useful for achieving δ-layer doping of silicon by manganese. 20 In this study, Mn was found to be incorporated into Si as an interstitial dopant in good agreement with recent first-principles calculations.…”
Section: Introductionmentioning
confidence: 99%
“…The main problem here is similar to that arising in the case of deposition of Mn layers onto the Si surface, when the formation of a silicide ultrathin interface at the boundary between the Si substrate and the Mn layer destroys the magnetic overlayer homogeneity. [19][20][21][22] Nevertheless, under suitable growth conditions, Mn can form a two-dimensional row-like structure, which could be useful for achieving δ-layer doping of silicon by manganese. 20 In this study, Mn was found to be incorporated into Si as an interstitial dopant in good agreement with recent first-principles calculations.…”
Section: Introductionmentioning
confidence: 99%
“…This is clear by considering the VB of SiO 2 shown Fig. 3-c and by discussing the spectral features at the light of recent papers on the Mn-Si(100) interface such as [40]. The Si spectral weight in the valence band region was shown to be distributed in three regions, roughly ranging from 0 to 5, from 5 to 8, and from 8 to 12 eV, respectively.…”
Section: X-ray Photoemission Spectroscopymentioning
confidence: 86%
“…According to Ref. [40], when doped with Mn, the first region remarkably changed, due to the presence of the Mn-derived spectral weight. We find similar effects in our samples, supporting the conclusion of silicide formation.…”
Section: X-ray Photoemission Spectroscopymentioning
confidence: 97%
“…Образование наноразмерных округлых выделений мо-носилицида марганца, выявленных в островках ВСМ объемом свыше 1000 мкм 3 , по-видимому, может быть связано с формированием объемного сростка относи-тельно больших зерен ВСМ, для которых характерно выделение паразитной фазы MnSi.…”
Section: экспериментальные результатыunclassified
“…Тонкие пленки силицидов переходных металлов, в том числе высших силицидов марганца (ВСМ), уже находят применение в современной микро-и наноэлектронике, оптоэлектронике, микросенсорике и других областях со-временной техники [1][2][3][4]. Показана возможность созда-ния пленочных термобатарей и других термоэлементов на основе ВСМ на кремнии [5].…”
Section: Introductionunclassified