1971
DOI: 10.1149/1.2408038
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The Growth of Epitaxial Gallium Phosphide from the Vapor Phase by Halogen Transport

Abstract: Gallium phosphide has been grown epitaxially by open tube vapor transport using the H2/PCl3/normalGa system. Although normalGaAs substrates have been used for the majority of the work, the more recent use of Czochralski grown normalGaP has enabled a reduction in both strain and stacking fault density of the epitaxial layer to be achieved. Sulfur, tellurium, and zinc have been used as dopants in the preparation of both n‐ and p‐type layers, and relationships have been established between the dopant level … Show more

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Cited by 16 publications
(3 citation statements)
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“…The substrates used were either (100) or (1 1 1)B oriented slices cut from gallium phosphide ingots grown by the liquid encapsulated Czochralski technique [8] or were high resistivity (p > 103~cm) slices grown by the halide transport vapour deposition technique [4]. Prior to use, they were lapped, polished with 1 tLm, then k tzm paste, degreased, etched in 50 aqua regia and finally rinsed in double deionised water.…”
Section: Liquid Epitaxy Growth Processmentioning
confidence: 99%
See 1 more Smart Citation
“…The substrates used were either (100) or (1 1 1)B oriented slices cut from gallium phosphide ingots grown by the liquid encapsulated Czochralski technique [8] or were high resistivity (p > 103~cm) slices grown by the halide transport vapour deposition technique [4]. Prior to use, they were lapped, polished with 1 tLm, then k tzm paste, degreased, etched in 50 aqua regia and finally rinsed in double deionised water.…”
Section: Liquid Epitaxy Growth Processmentioning
confidence: 99%
“…Although data has been published on the distribution coefficient of various important electricallyactiveimpuritiesin gallium phosphide, these are mostly for growth from a stoichiometric melt at its melting point [3] or for growth from the vapour phase by halide transport [4]. Little information is available on the doping characteristics of the various important elements when the crystals are grown from a Ga rich melt.…”
Section: Introductionmentioning
confidence: 99%
“…The first conditions used were borrowed mostly from Sudlow et al's HVPE growth of GaP 114 . In these initial experiments, the Sb temperature zone was held at 600°C and the gallium temperature zone was held at 800°C.…”
Section: Synthesis and Materials Characterization Of Hvpe Grown Gasbpmentioning
confidence: 99%