1984
DOI: 10.1016/0368-1874(84)83577-7
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The growth and properties of thin oxide layers on tantalum electrodes

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Cited by 124 publications
(80 citation statements)
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“…This value is in good agreement with previously reported values ͑ϳ2-3 nm͒. [41][42][43] CSAFM measurements were carried out using a PicoSPM microscope ͑Molecular Imaging͒ and a PicoScan controller ͑Molecular Imaging͒. Pattern formation was achieved by applying bias between the Pt coated conductive Pt/Si 3 N 4 tip ͑MikroMasch, typical spring constant: 0.12 N/m, parabolic shape with an apex of the radius of curvature: Ͻ35 nm͒ and the Ta substrate at room temperature ͑ϳ23°C͒ and ambient humidity of ϳ38Ϯ2%.…”
Section: Methodssupporting
confidence: 93%
“…This value is in good agreement with previously reported values ͑ϳ2-3 nm͒. [41][42][43] CSAFM measurements were carried out using a PicoSPM microscope ͑Molecular Imaging͒ and a PicoScan controller ͑Molecular Imaging͒. Pattern formation was achieved by applying bias between the Pt coated conductive Pt/Si 3 N 4 tip ͑MikroMasch, typical spring constant: 0.12 N/m, parabolic shape with an apex of the radius of curvature: Ͻ35 nm͒ and the Ta substrate at room temperature ͑ϳ23°C͒ and ambient humidity of ϳ38Ϯ2%.…”
Section: Methodssupporting
confidence: 93%
“…−0.5 V, no evident current was observed in the positive potential region, showing that the tantalum anodic oxide film is an n-type semiconductor. 22) The anodic current peak observed around −0.75 V should be due to the oxidation of hydrogen. Figure 2 shows Cole-Cole plots of the Ta anodic oxide, which was prepared at the preparation potential of 10 V in 0.1 M citric acid aqueous solution, measured −0.85, −0.60, 0.0, and +1.50 V. AC impedance measurements also showed n-type semiconducting property, supporting the result of the cyclic voltammetry.…”
Section: Methodsmentioning
confidence: 98%
“…On the other hand semiconducting passive films in a large range of thickness (2 ~ 74 whilst at large film thickness the same transition may occur with increasing ac signal frequency. [75][76][77][78] In this frame the theory of amorphous semiconductor Schottky barrier provides a unified approach to the theory of electrical admittance of electrode/electrolyte junction including as limiting case the ideal SC/electrolyte junction on which the traditional M-S approach is based.…”
Section: Location Of Characteristic Energy Level In C-semiconductor/ementioning
confidence: 96%