The Geometric Contribution to Gauge Factor of Patterned Lines on Substrates

Gouldstone, C.; Wu, Yeping; Gouldstone, Andrew

doi:10.1111/j.1475-1305.2007.00353.x

Cited by 2 publications

(2 citation statements)

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“…Also shown is a measured surface profile using a 3D white light interferometer (Zygo Corporation), which illustrates the intrinsic roughness of thermal-spraybased sensors. Additional discussions and analysis of thermal spray-based resistive strain gages can be found in Ref 8,11,13,26. Capacitive strain gages fabricated using direct-write thermal spray have also been demonstrated, although no laser processing was used in their fabrication (Ref 19).…”

Section: Resistive Strain Gagesmentioning

confidence: 97%

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Using Thermal Spray and Laser Micromachining to Fabricate Sensors

et al. 2011

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The use of thermal spray to fabricate sensors directly onto engineering components is an emerging technology. The capabilities for sensor fabrication are considerably enhanced with the use of laser micromachining, in which feature sizes as small as 15-20 lm can be achieved. Such feature sizes are required for a variety of sensors, including strain and heat flux sensors, thermopiles and microheaters. Ultrafast lasers-lasers with pulse durations [1 ps-are particularly well suited for the multimaterial/ multilayer processing required to fabricate sensors from materials deposited using thermal spray. In this work, the key issues associated with laser micromachining of thermal spray coatings for sensor applications are presented. Both resistive strain gages and microheaters are discussed in detail as representative sensor designs that require the fine feature and linewidth capability that laser micromachining provides, including details of their fabrication and practical design restrictions. This article summarizes with recommendations for future work.

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Section: Resistive Strain Gagesmentioning

confidence: 97%

“…The change in electrical resistance in the gage is due to both geometrical changes taking place in the patterned gage lines and physical changes within the metal itself ( Ref 13,25). The gage pattern and geometric parameters such as conductor length, width, number, and thickness are key design parameters ( Ref 8,11,13,26).…”

Section: Resistive Strain Gagesmentioning

confidence: 99%