The future of MEMS in telecommunications networks

Walker, James Alfred

doi:10.1088/0960-1317/10/3/201

Cited by 110 publications

(65 citation statements)

References 18 publications

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“…A beamlike structure is suitable for reliable manufacturing, design and dynamic tuning in operating conditions for microsensors, microactuators in resonant devices and microswitches [1][2][3][4][5][6][7][8][9][10][11][12][13]. It is therefore required implementing effective numerical models to predict the electromechanical behaviour of microstructures actuated by the electric field, as stand-alone systems or as structural components of assembled microdevices.…”

Section: Introductionmentioning

confidence: 99%

FEM modelling and experimental characterization of microbeams in presence of residual stress

Ballestra

Brusa

Pasquale

et al. 2009

Analog Integr Circ Sig Process

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Out-of-plane bending tests are here used to experimentally validate some numerical models of microbeams actuated by the electric field. Out-of-plane bending microcantilevers and clamped-clamped microbeams often suffer the presence of residual strain and stress, respectively, which affect their static and dynamic behaviour and pull-in voltage. In case of microcantilever an accurate modelling has to include the effect of an initial curvature due to microfabrication process, while in double clamped microbeams constraints may impose a pre-loading caused by a tensile stress. So-called geometrical nonlinearity sometimes occurs, when microcantilever exhibits large displacement, or because of the mechanical coupling between axial and flexural behaviours in double clamped microbeams. Modelling this kind of nonlinearity is an additional goal of this study. Experiments demonstrated a good agreement with results of FEM approaches proposed. In the case of microbridges numerical models are used to identify the residual stress. A reverse analysis is implemented, the axial pre-stress is calculated by means of the measured pull-in voltage.

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Section: Introductionmentioning

confidence: 99%

FEM modelling and experimental characterization of microbeams in presence of residual stress

Ballestra

Brusa

Pasquale

et al. 2009

Analog Integr Circ Sig Process

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“…This field includes several substantive advantages of MEMS such as orders of magnitude smaller size, better performance than other solutions, possibilities for batch fabrication and costeffective integration with electronics, virtually zero dc power consumption and potentially large reduction in power consumption, etc. Due to these advantages microoptoelectromechanical systems (MOEMS) including optical switches (Ford et al 1999), microscanners (Dickensheets and Kino 1998), digital micromirror device (DMD) (Hornbeck 1991) etc, are investigated for emerging related fields like all-optical telecommunication networks (Walker 2000). In the MOEMS systems electrostatic micromirror is used widely as an actuator.…”

Section: Introductionmentioning

confidence: 99%

Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

2007

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In this paper the electromechanical behavior of a torsional micromirror was investigated using of a static model with considering torsion and bending characteristics of micro-beams. A set of nonlinear equations based on the parallel plate capacitor model was derived to represent the relationships between the applied voltage, torsion angle, and vertical displacement of the torsional micromirror.Step by step linearization method (Newton's method) was used to calculate the rotation angle and vertical displacement of the micromirror due to the applied voltage. This method is fast and gave acceptable and accurate results which were in good agreement with the experimental data.

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“…Torsional micromirrors are used for optical switching in fiber optic networks [15][16][17]. The mirror switches the light waves carrying data from one fiber to another in order to reach their destination.…”

Section: Torsional Micromirrorsmentioning

confidence: 99%

“…To solve this problem, we propose a technique which combines balance of energy with the analytical approximate solution of Equations (11a), (11b), and (16) in an iterative manner. To allow for better understanding of the technique, we first treat mirrors with very large quality factors where the damping is negligible.…”

Section: Controller Designmentioning

confidence: 99%

Input-shaping control of nonlinear MEMS

2007

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We develop a new technique for preshapcal systems (MEMS). In general, MEMS are excited using an electrostatic field which is a nonlinear function of the states and the input voltage. Due to the nonlinearity, the frequency of the device response to a step input depends on the input magnitude. Therefore, traditional shaping techniques which are based on linear theory fail to provide good performance over the whole input range. The technique we propose combines the equations describing the static response of the device, an energy balance argument, and an approximate nonlinear analytical solution of the device response to preshape the voltage commands. As an example, we consider set-point stabilization of an electrostatically actuated torsional micromirror. The shaped commands are applied to drive the micromirror to a desired tilt angle with zero residual vibrations. Simulations show that fast mirror switching operation with almost zero overshoot can be realized using this technique. The proposed methodology accounts for the energy of the significant higher modes and can be used to shape input commands applied to other nonlinear micro-and macro-systems.

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The future of MEMS in telecommunications networks

Cited by 110 publications

References 18 publications

FEM modelling and experimental characterization of microbeams in presence of residual stress

FEM modelling and experimental characterization of microbeams in presence of residual stress

Investigation of the torsion and bending effects on static stability of electrostatic torsional micromirrors

Input-shaping control of nonlinear MEMS

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