1989
DOI: 10.1063/1.857520
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The film formation dynamics in spin coating

Abstract: Thin film formation using the process of spin coating is investigated. The liquid film and surrounding gas phase two-dimensional (2-D) full governing equations with applicable boundary conditions are formulated. The heat and mass transfer that occurs in the gas and liquid phase and across the free surface, including the evaporation of solvent, are taken into account. The governing equations and boundary conditions are then reduced to a I-D case based on the variables radial dependency. The detailed film format… Show more

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Cited by 65 publications
(49 citation statements)
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“…3b-3c are unable to describe the dynamics of spinup when inertial effects are important (Higgins, 1986;Rehg and Higgins, 1988). Recently, Ohara et al (1989) proposed Eqs. 2-5 as a model of spin coating, but they did not consider inertial effects as these effects were apparently unimportant in their study.…”
Section: Mathematical Formulationmentioning
confidence: 98%
“…3b-3c are unable to describe the dynamics of spinup when inertial effects are important (Higgins, 1986;Rehg and Higgins, 1988). Recently, Ohara et al (1989) proposed Eqs. 2-5 as a model of spin coating, but they did not consider inertial effects as these effects were apparently unimportant in their study.…”
Section: Mathematical Formulationmentioning
confidence: 98%
“…While the dynamics of spin-coating has been studied extensively and quantitatively in simple one-component fluids 8,9 as well as in polymer solutions, 10,11 the study of the dynamics of colloid spin-coating has been limited to numerical studies of thinning rates. 12 A recent work demonstrates that spin-coating flows (in the absence of evaporation) control the local stress profiles, and drive crystallization when the Peclet number exceeds a critical value.…”
mentioning
confidence: 99%
“…Spin coating is one of the most common techniques used for depositing uniform thin films from a few nanometers to a few micrometers in thickness on flat substrates [64].…”
Section: Spin Coatingmentioning
confidence: 99%