2017
DOI: 10.1016/j.optcom.2016.08.017
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The fabrication of flip-covered plasmonic nanostructure surfaces with enhanced wear resistance

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Cited by 5 publications
(5 citation statements)
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“…The photonic Ag nanotip array was fabricated using a bilayer UV nanoimprint lithography (NIL) and lift-off process. , The fabrication scheme of the Ag nanotip array is shown in Figure a. The hexagonal-arrayed nanohole Si master with a diameter of 150 nm, interval of 300 nm, and depth of 150 nm was fabricated following our previous work. , A lift-off resist of LOR5A (MicroChem) with a thickness of 500 nm was spin-coated on a 2 in. glass wafer, followed by the spin-coating of a UV curable silicon-based NIL resist (LV400, Chemoptics).…”
Section: Methodsmentioning
confidence: 99%
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“…The photonic Ag nanotip array was fabricated using a bilayer UV nanoimprint lithography (NIL) and lift-off process. , The fabrication scheme of the Ag nanotip array is shown in Figure a. The hexagonal-arrayed nanohole Si master with a diameter of 150 nm, interval of 300 nm, and depth of 150 nm was fabricated following our previous work. , A lift-off resist of LOR5A (MicroChem) with a thickness of 500 nm was spin-coated on a 2 in. glass wafer, followed by the spin-coating of a UV curable silicon-based NIL resist (LV400, Chemoptics).…”
Section: Methodsmentioning
confidence: 99%
“…The hexagonal-arrayed nanohole Si master with a diameter of 150 nm, interval of 300 nm, and depth of 150 nm was fabricated following our previous work. 29,40 A lift-off resist of LOR5A (MicroChem) with a thickness of 500 nm was spincoated on a 2 in. glass wafer, followed by the spin-coating of a UV curable silicon-based NIL resist (LV400, Chemoptics).…”
Section: ■ Experimental Detailsmentioning
confidence: 99%
“…The dual NTP process starts with the preparation of a hexagonal nanohole-type polyurethane-acrylate (PUA) mold replicated twice using a silicon (Si) master. The hexagonal nanohole-type Si master with a diameter of 150 nm, period of 300 nm, and depth of 100 nm was prepared according to our previous works [30,31]. A thin Au layer with 20 nm thickness was deposited on the PUA nanohole-type mold using an e-beam evaporator under the condition of minimized side wall deposition, as shown in figure 1(a).…”
Section: Fabrication Of Complementary Plasmonic Biosensorsmentioning
confidence: 99%
“…To overcome additional subsequent processes issue, nanotransfer printing (NTP), wherein a metal layer deposited on the convex parts of a soft polymer mold is transferred to a substrate based on the difference in the bonding strength of the metal/mold and metal/substrate interfaces [28][29][30][31], is another promising nanolithography method for fabricating plasmonic nanostructures.…”
Section: Introductionmentioning
confidence: 99%
“…Nanostructured color filters have consistently been the focus of investigation because of their applications in digital displays, high-resolution color printing, , anticounterfeiting, and information encoding. , Various types of nanostructures based on plasmonic materials such as Ag, Au, and Al have been studied to achieve diverse spectral filters. With the development of nanofabrication technologies, color generation has been achieved by the use of diverse methods, including surface plasmons and the interaction of light with metallic nanostructures, subwavelength hole arrays in metal films, metal/insulator/metal nanoresonators, and plasmonic nanostructure of various designs. Numerous studies have demonstrated the improvement of transmission through thick metal films by the use of arrays with subwavelength-size holes, such as nanopatches, nanoparticle arrays, and nanodisks. So far, researchers have mainly focused on the development of one fixed color for the formatting of color filters. These designs are based on the use of incident white light-based nanopatterning and are limited to the fabrication of hard and microsized substrates.…”
Section: Introductionmentioning
confidence: 99%