2009
DOI: 10.1088/0957-4484/20/28/285307
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The fabrication of carbon nanotube probes utilizing ultra-high vacuum transmission electron microscopy

Abstract: An application of ultra-high vacuum transmission electron microscopy (UHV TEM) is demonstrated for the fabrication of carbon nanotube (CNT) probes. In this study, all the fabrication processes -- such as CNT attachment, CNT orientation manipulation, and apex trimming -- are integrated into a single UHV TEM system. The in situ work under UHV conditions (<5 x 10(-10) mbar) allows us to clean the tip surface at the start of the fabrication process to ensure a good contact between the tip and CNT. Furthermore, the… Show more

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Cited by 12 publications
(15 citation statements)
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“…Therefore, the well-known high-aspect-ratio carbon nanotube (CNT) probe should be a convenient candidate to solve the bluntness problem. Our recent technique has outlined a routine process to fabricate high-quality CNT probes with the telescope shape, which have reduced the typical artifacts found in the tapping-mode AFM measurement using a conventional longer and softer CNT probe [6]. When applied to the LFM measurement, the much stronger tip-sample interaction due to the contact will further disadvantage the use of a flexible CNT.…”
Section: Carbon-nanotube-probed Lateral Force Measurementmentioning
confidence: 99%
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“…Therefore, the well-known high-aspect-ratio carbon nanotube (CNT) probe should be a convenient candidate to solve the bluntness problem. Our recent technique has outlined a routine process to fabricate high-quality CNT probes with the telescope shape, which have reduced the typical artifacts found in the tapping-mode AFM measurement using a conventional longer and softer CNT probe [6]. When applied to the LFM measurement, the much stronger tip-sample interaction due to the contact will further disadvantage the use of a flexible CNT.…”
Section: Carbon-nanotube-probed Lateral Force Measurementmentioning
confidence: 99%
“…When the current reached ∼10 μA, the heat accumulated at roughly the central position burned the CNT off. The complete procedures of CNT probe fabrication were conducted in our UHV transmission electron microscope (TEM) (JEOL JEM-2000V) and described in [6].…”
Section: Carbon-nanotube-probed Lateral Force Measurementmentioning
confidence: 99%
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“…[1][2][3] Multi-walled carbon nanotube (MWCNT), which has superior mechanical properties compared to single-walled carbon nanotube (SWCNT), are applied to various industries like nanotube composites, STM, AFM, EFM tips, and biomaterial. 4 The various methods for CNT synthesis have been introduced such as chemical vapor deposition (CVD), electric arc discharge, and laser evaporation. [5][6][7] Catalytic chemical vapor deposition is known as the most promising one, since it can produce high-quality nanotubes using catalytic reaction with the decomposition of hydrocarbons and the disproportionation of carbon monoxide.…”
Section: Introductionmentioning
confidence: 99%
“…12 The third key feature we added to our system is the attachment of a carbon nanotube (CNT) to the modified commercial AFM pyramidal probe. This process was carried out in our ultrahigh vacuum transmission electron microscope and scanning tunneling microscope (UHV TEM-STM) combined system, 13 and the tube probe, displayed in Fig. 1(c), is usually short and inclined to a side.…”
mentioning
confidence: 99%