The experimental study of super-smooth surface processing technology for optical glass and sapphire component

Abstract

This paper describes the super smooth surface optical processing methods for optical glass and sapphire components. The super smooth surfaces of optical glass through BFP (Bowl-Feed Polishing) method and sapphire through CMP (Chemo-Mechanical Polishing) method are produced respectively. Microstructures of each processing steps are measured through non-contact method with Zygo NV5022s. Finally, the experimental results are given: the roughness of both optical glass and sapphire component is around 0.5nm (rms or Ra).