Abstract:Due to lack of desirable mechanical properties of silicon substrate; the current trend of
micro-fabrication technology is towards metallic materials. In this study, the electrochemical micromachining
(EMM) technology is developed to fabricate micro-scale flow channels on thin metallic
316L stainless steel plate. The cathode electrode, the tool, is the mirror image of flow channels. It
was produced by the MEMS and UV-LIGA technology and the size is 200μm in width and 500μm
in height for the intension to fabrica… Show more
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