The electrical properties of nitrogen-doped vanadium dioxide thin films grown by magnetron sputtering
Jiaxin Song,
Yuxin Jia,
Dongxiao Fu
et al.
Abstract:Vanadium dioxide (VO2) undergoes a reversible semiconductor-metal phase transition near 68°C, and the optical and electrical properties could be changed in femtoseconds. These unique characteristics meet the electro-optic switch applications. In this work, to improve the intrinsic characteristics of VO2, a series of nitrogen-doped vanadium dioxide thin films were prepared by reactive magnetron sputtering. Moreover, the effects of different nitrogen flow rates on the microstructure, surface morphology, electric… Show more
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