The effects of thermal treatment on the anisotropic etching behavior of Cz- and Fz-silicon

Hein, Aylin; Finkbeiner, S.; Marek, Jiří; Obermeier, Ε.

doi:10.1016/s0924-4247(00)00407-6

Cited by 13 publications

(1 citation statement)

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“…A potential cause of steplike roughness is precipitation of interstitial oxygen during thermal treatments such as oxidation and nitride growth. Precipitated oxygen may give rise to stress which can be relieved by generation of defects [17]. In order to reduce the risk of defect generation, the oxidation temperature was reduced from 1050 to 900 • C whereas the LPCVD temperature was kept constant at 780 • C. However, no improvement of surface quality was obtained and the original temperatures were therefore maintained.…”

Section: Discussionmentioning

confidence: 99%

Microfabrication of saw-tooth refractive x-ray lenses in low-Zmaterials

Ribbing

Cederström²,

Lundqvist

2003

J. Micromech. Microeng.

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Saw-tooth x-ray refractive lenses have been fabricated in silicon, epoxy and diamond. Silicon lenses were made by anisotropic wet etching of single crystalline silicon. Epoxy lenses were moulded from silicon masters. Diamond lenses were replicated by chemical vapour deposition on silicon masters and subsequent sacrificial etching of silicon. Beryllium saw-tooth test structures were embossed using a diamond master. Silicon and epoxy lenses gave sub-micron focal lines and provided gains of up to 40 when tested in a synchrotron set-up. Focal lengths ranged from 0.33 to 0.61 m for x-ray energies between 14 and 30 keV.

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Section: Discussionmentioning

confidence: 99%