2009
DOI: 10.1088/0957-4484/20/25/255306
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The effects of the focus ion beam milling process on the optical properties of semiconductor nanostructures

Abstract: In this work, the effects of the focus ion beam (FIB) milling process on the optical properties of semiconductor nanostructures were investigated. With this aim, a sensitive materials system based on InGaAs/GaAs quantum dots with well known and excellent optical properties was selected for the FIB treatment. The FIB technique was used to locally remove a metallic mask deposited on top of the quantum dot sample. The photoluminescence (PL) signal, collected from the circular openings, was used to infer the possi… Show more

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Cited by 4 publications
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“…631 The FIB treatment was used to remove a metallic mask deposited on top of the quantum dot, but it was found that the FIB caused damage on the dots, resulting in total inhibition of the luminescence properties of the InGaAs/GaAs quantum dots.…”
Section: Inas Quantum Dotsmentioning
confidence: 99%
“…631 The FIB treatment was used to remove a metallic mask deposited on top of the quantum dot, but it was found that the FIB caused damage on the dots, resulting in total inhibition of the luminescence properties of the InGaAs/GaAs quantum dots.…”
Section: Inas Quantum Dotsmentioning
confidence: 99%