The effects of nonlinear series resonance on Ohmic and stochastic heating in capacitive discharges

Lieberman, M. A.; Lichtenberg, A. J.; Kawamura, Emi; Mussenbrock, Thomas; Brinkmann, Ralf Peter

doi:10.1063/1.2928847

Cited by 95 publications

(95 citation statements)

References 27 publications

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“…However, as discussed in Ref. 6, self-excited harmonics can resonate and enhance the ohmic and stochastic heating at low pressures.…”

Section: Introductionmentioning

confidence: 94%

“…The series resonance occurs at a lower frequency related to the plasma frequency through a geometric factor involving the sheath thickness (s) and plasma length (L), x $ x p ffiffiffiffiffiffiffi s=L p . These resonant behaviors of the plasma have been intensively investigated over the years [3][4][5][6][7][8][9] (a brief chronological review is made in Ref. 3).…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Modeling of microplasmas from GHz to THz

Gregório

Hoskinson

Hopwood

2015

Journal of Applied Physics

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We present a study of atmospheric-pressure microdischarges sustained over a wide range of continuous excitation frequencies. A fluid model is used to describe the spatial and temporal evolution of the plasma properties within a 200 μm discharge gap. At 0.5 GHz, the behavior is similar to a typical rf collisional discharge. As frequency increases at constant power density, we observe a decrease in the discharge voltage from greater than 100 V to less than 10 V. A minimum of the voltage amplitude is attained when electron temporal inertia delays the discharge current to be in phase with the applied voltage. Above this frequency, the plasma develops resonant regions where the excitation frequency equals the local plasma frequency. In these volumes, the instantaneous quasi-neutrality is perturbed and intense internal currents emerge ensuring a low voltage operation range. This enhanced plasma heating mechanism vanishes when the excitation frequency is larger than the local plasma frequency everywhere in the plasma volume. For a typical peak electron density of 5×1020 m−3, this condition corresponds to ∼0.2 THz. Beyond the plasma frequency, the discharge performs like a low loss dielectric and an increasingly large voltage is necessary to preserve a constant absorbed power.

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“…However, as discussed in Ref. 6, self-excited harmonics can resonate and enhance the ohmic and stochastic heating at low pressures.…”

Section: Introductionmentioning

confidence: 94%

Section: Introductionmentioning

confidence: 99%

Modeling of microplasmas from GHz to THz

Gregório

Hoskinson

Hopwood

2015

Journal of Applied Physics

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“…The temperature dependent terms in equation (10) can be express as [11,12] The equation (6), (8), and (10) are solve simultaneously coupling with the equation (11)(12)(13) to determine the three unknown plasma temperature T e , plasma density n e and the correction factor c f .…”

Section: The Equations and Modelingmentioning

confidence: 99%

“…There are several diagnostic techniques employed for the determination of electron density and temperature in dc plasmas which includes Langmuir probe [5,6], plasma spectroscopy [7,] microwave and laser interferometries, and Thomson scattering [8][9][10]. Several characterization techniques are reported in recent literature to characterize the atmospheric pressure capacitively couple radio frequency (CCRF) plasma for different experimental parameters [11][12][13][14]. The electrical discharge characteristic can be also used to estimate the plasma parameters, which is simpler, easier, quicker and no additional equipment is required [11].…”

Section: Introductionmentioning

confidence: 99%

Diagnostic of Capacitively Coupled Low Pressure Radio Frequency Plasma: An Approach through Electrical Discharge Characteristic

Bora¹,

Bhuyan²,

Favre³

et al. 2011

IJAPM

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Abstract-Low temperature radio frequency plasma is widely used in low temperature plasma processing medium for material processing in many fields including microelectronics, aerospace, and the biology. For proper utilization of the process, it is very much important to know the plasma parameters. In this paper a technique is reported to determine the plasma parameters from the electrical discharge characteristic of a capacitivly couple radio frequency argon plasma. The homogeneous discharge model is modified to make it applicable in low pressure by incorporating the plasma series resonance effect. The effect on the plasma resistance by the change in drift velocity of the electron with rf electric filed is also considered. The electron density and temperature is found to be well agreed with the Langmuir probe diagnostic result, which is in the range of 0.5x10 10 to 4.5x10 10 cm -3 and 1.4 to 1.6 ev for wide range of rf power.Index Terms-Capacitive couple radio frequency plasma, discharge characteristic, homogeneous discharge model, plasma parameters, power balance.

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“…For both single-frequency and dual-frequency discharges we will study how exactly the energy dissipation is distributed over the rf period and which role is played by the PSR. Our tool is a model similar to the one of Lieberman et al 23 and Mussenbrock et al 24 It differs from the model used in Ref. 20 by including both Ohmic and stochastic dissipation-the latter via the Godyak formula for an effective collision frequency 1 -and by a self-consistent incorporation of the dc self-bias.…”

Section: Introductionmentioning

confidence: 99%