The effects of neutral gas heating on H mode transition and maintenance currents in a 13.56 MHz planar coil inductively coupled plasma reactor

Abstract

Development of a low-energy and high-current pulsed neutral beam injector with a washer-gun plasma source for high-beta plasma experiments Rev. Sci. Instrum. 83, 083504 (2012) A stochastic mechanism of electron heating Phys. Plasmas 19, 082506 (2012) Toroidal ripple transport of beam ions in the mega-ampère spherical tokamak Phys. Plasmas 19, 072514 (2012) Global model of a gridded-ion thruster powered by a radiofrequency inductive coil Phys. Plasmas 19, 073512 (2012) Additional information on Phys. Plasmas

Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

“…power, due to the increased power deposition of the source into plasma particles. Deviation of the measured data at 140 W for 0.1 mbar argon pressure is due the point being close to the mode transition point [8]. However, more significant increase in T n is seen at the same measured power with increasing argon pressure.…”

Equivalent circuit effects on mode transitions in H2 inductively coupled plasmas

“…6 As is well known, two discharge modes exist in typical reactors, i.e., the capacitive E mode at low density and the inductive H mode at high density. [7][8][9][10][11][12][13][14] Either continuous or abrupt transitions between the two discharge modes can be triggered by varying the applied power or the matching status of the circuit. We also note that the mode transitions of these bi-stable discharges in ICP and microwave plasmas 15 exhibit hysteresis, and several mechanisms have been proposed to explain the presence of hysteresis, including nonlinear behavior in the plasma and the circuit, the effects of impedance matching, and power loss in the external circuit.…”