1998
DOI: 10.1016/s0040-6090(98)00371-x
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The effects of deposition rate and substrate temperature of ITO thin films on electrical and optical properties

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Cited by 119 publications
(55 citation statements)
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“…The ITO films reported herein exhibit resistivity value of 10.540 9 10 -3 , 8.323 9 10 -3 and 7.957 9 10 -3 X cm at the deposition temperature of 400, 450, and 500°C, respectively, compared to highly resistive bare PI substrate. Higher deposition temperature influences the film micro-structure and surface roughness as also revealed through AFM, leading to the decrease in surface resistivity [37,38]. The obtained resistivity values of the ITO films are found to be slightly higher than the values obtained by Hao et al [39] for ITO/PET system.…”
Section: Electrical Propertiesmentioning
confidence: 70%
“…The ITO films reported herein exhibit resistivity value of 10.540 9 10 -3 , 8.323 9 10 -3 and 7.957 9 10 -3 X cm at the deposition temperature of 400, 450, and 500°C, respectively, compared to highly resistive bare PI substrate. Higher deposition temperature influences the film micro-structure and surface roughness as also revealed through AFM, leading to the decrease in surface resistivity [37,38]. The obtained resistivity values of the ITO films are found to be slightly higher than the values obtained by Hao et al [39] for ITO/PET system.…”
Section: Electrical Propertiesmentioning
confidence: 70%
“…Table 2 lists the physical 80 (visible) [22] Note: RT means room temperature. characteristics and optical properties of the ITO coated glass used in this study.…”
Section: Properties Of the Heat Reflector Window (Hrw) Glassmentioning
confidence: 99%
“…Due to its high optical transmittance in the visible and nearinfrared light [18][19][20][21][22] as well as high reflectance [18] in the infrared spectral region, ITO is frequently used in photovoltaic devices [18][19][20][21][22][23] and various optoelectronic devices [19], infrared reflectors [18,23], and flat panel display [18,23]. Indium Tin Oxide has also been used as transparent electrodes for spectroelectrochemical studies due to its low electrical resistivity and its wide electrochemical window [24].…”
Section: Introductionmentioning
confidence: 99%
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“…The material surface is always in touch with its surroundings [4] [5]. Corrosion and erosion are found on the surface of objects and are related to light and interaction with external electric and magnetic fields in surface [6].…”
Section: Introductionmentioning
confidence: 99%