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2017 International Seminar on Sensors, Instrumentation, Measurement and Metrology (ISSIMM) 2017
DOI: 10.1109/issimm.2017.8124277
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The effectivity of haloalkane (CH<inf>2</inf>FCF<inf>3</inf>) plasma in selective etching of a quartz crystal microbalance biosensor

Dionysius Joseph Djoko Herry Santjojo
1
,
Setyawan P. Sakti
2
,
Masruroh Masruroh
3
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