The effect of thickness on the properties of Zr-Hf-N thin films prepared by reactive co-magnetron sputtering

Prathumsit, Jedsada; Gitgeatpong, G.; Phae-ngam, Wuttichai; Chananonnawathorn, Chanunthorn; Lertvanithphol, Tossaporn; Horprathum, Mati

doi:10.1063/5.0023274

Cited by 7 publications

(4 citation statements)

References 11 publications

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“…Additionally, the average grain size was increased with an increasing number of layers from 1 to 6L due to the shadowing effect (Figure S4). 34 X-ray diffraction (XRD) measurements were performed to investigate the structural property of the 4L density-modulated WO x film. As shown in Figure S5A, no obvious diffraction peaks were observed in the asgrown film, suggesting the amorphous nature of the WO x film.…”

Section: Resultsmentioning

confidence: 99%

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Density‐modulated multilayered homo‐junction tungsten oxide anode materials for high‐capacity Li‐ion batteries with long‐term stability

Kim

Cho

et al. 2021

Intl J of Energy Research

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Summary We report an effective strategy generally applicable towards improving Li‐ion battery performance with insulating metal oxide‐based anode materials. We fabricated density‐modulated multilayered homo‐junction tungsten oxide (WOx) films as anode materials for Li‐ion batteries, in which high‐ and low‐density thin layers were alternately deposited on Cu current collectors using radio frequency magnetron sputtering. The performance of the battery with multilayered WOx was systematically optimized by changing the number of layers and deposition order. A 4‐layer density‐modulated WOx anode with a low density on top WOx layer showed superior performance with a high reversible capacity of 508 mAh g−1 after 200 cycles at a current density of 0.2 A g−1. Moreover, it provided a reversible capacity of 150 mAh g−1 and good coulombic efficiency of 93.7% after 1000 cycles at a high current density of 2 A g−1 and showed excellent rate capability and cycling stability. The observed outstanding battery performance of the density‐modulated multilayer WOx anode can be attributed to its controlled mass loading, optimized charge‐transfer kinetics, and favourable morphology.

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Section: Resultsmentioning

confidence: 99%

“…Additionally, the average grain size was increased with an increasing number of layers from 1 to 6L due to the shadowing effect (Figure S4). 34 …”

Section: Resultsmentioning

confidence: 99%

Density‐modulated multilayered homo‐junction tungsten oxide anode materials for high‐capacity Li‐ion batteries with long‐term stability

Kim

Cho

et al. 2021

Intl J of Energy Research

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“…The effect of Ag diameter and deposition time on the chemical concentration of Ag-doped Cr films are shown in Table 2. The atomic concentration of Ag in the film increases with the diameter of Ag on the Cr target, and the film thickness and at% Ag also linearly increase with deposition time [26,27]. The minimum % of Ag deposited was 0.27 at%, and this is for a Ag diameter of 6 mm and deposition time of 15 min, while the maximum deposited Ag content was 6.11 at%, which was for Ag diameter of 13 mm and deposition time of 30 min.…”

Section: Chemical Composition Of Thin Filmsmentioning

confidence: 99%

Effects of Ag-doped Content on Antimicrobial Activity and Substrate Color of Chromium Thin Films Deposited by DC Magnetron Sputtering

Thanasriswad,

Sakdanuphab,

Sakulkalavek

et al. 2023

cast

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Silver ions (Ag+) show promise as excellent antimicrobial agents to inhibit microbial growth on high-touch surfaces. In this study, Ag-doped Cr films were deposited using a DC magnetron sputtering system from a mosaic target. The Cr-Ag mosaic target was a 0.125-inch-thick Cr base (99.95% pure) with different diameters of Ag circle sheets mounted on the Cr target. The sputtering condition was kept at a DC power of 100W, working pressure of 8.3x10-3 mbar with Ar as the sputtering gas, and sputtering times of 15 and 30 min. The antimicrobial activity and efficiency were determined by standard testing (JIS Z 2801: 2000). The antibacterial performance was calculated from the antibacterial inhibition of the Ag-doped Cr films in bacterial solution (Staphylococcus aureus and Escherichia coli) after 24 h. The results showed that the Ag content was between 0.27 at% and 6.11 at% depending on the diameter of Ag and the deposition time. The minimum Ag content of 4.05 at% had an inhibition efficiency of 99.98% (E. coli) and 96.33% (S. aureus). The contact angle testing of Ag-doped Cr films showed hydrophobic behavior with the angle greater than 90 degrees. The optical color of the Ag-doped films was characterized by UV-vis spectroscopy (CIE testing). The film colors were significantly changed by the addition of Ag into the Cr films. The total color difference (DE) increased by 3-10 units compared to the reference chromium film and the Ag doping mainly affected +L* (Lightness). Keywords: sputtering PVD; antibacterial agent; silver; mosaic target; ROS; gram-negative; gram-positive; CIE-L*ab *Corresponding author: Tel.: (+66)934598942 E-mail: 62609006@kmitl.ac.th

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“…Similarly, with an introduction of 12 wt.% Hf in ZrN, no noticeable increase in hardness was detected, while the adhesion to the substrate and wear resistance increased [26]. When 0-4.2 at.% Hf was introduced in the composition of the ZrN coating, a dense columnar structure was formed [27,28], while a significant growth of grains was detected when the content of Hf was 4.2 at.% [27]. The maximum hardness (28.6 ± 0.6 GPa) was demonstrated by the coating with 0.5 at.% Hf, while the hardness was decreasing with an increasing content of Hf [27].…”

Section: Introductionmentioning

confidence: 99%

Investigation of Properties of the Zr,Hf-(Zr,Hf)N-(Zr,Hf,Me,Al)N Coatings, Where Me Means Cr, Ti, or Mo

Vereschaka¹,

Sitnikov²,

Волосова

et al. 2021

Coatings

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The article describes the results of the investigation focused on the properties of the Zr,Hf-(Zr,Hf)N-(Zr,Hf,Me,Al)N coatings, where Me means chromium (Cr), titanium (Ti), or molybdenum (Mo). These coatings have three-layer architecture, including adhesion, transition, and wear-resistant layers, while the latter, in turn, has a nanolayer structure. Despite the fact that the coatings under study have close values of hardness and critical fracture load LC2, there are noticeable differences in wear resistance during the turning of steel. The tools with the coatings under study demonstrated better wear resistance compared to an uncoated tool and the tool with the commercial ZrN coating. The best wear resistance was detected for a tool with the Zr,Hf-(Zr,Hf)N-(Zr,Hf,Ti,Al)N coating. The study of the pattern of cracking in the structure of the coatings has found that, during the cutting process, active cracking occurs in the coating with Cr, which leads to the fracture of the coating, while the process of cracking is noticeably less active in the coatings with Ti or Mo.

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The effect of thickness on the properties of Zr-Hf-N thin films prepared by reactive co-magnetron sputtering

Cited by 7 publications

References 11 publications

Density‐modulated multilayered homo‐junction tungsten oxide anode materials for high‐capacity Li‐ion batteries with long‐term stability

Density‐modulated multilayered homo‐junction tungsten oxide anode materials for high‐capacity Li‐ion batteries with long‐term stability

Effects of Ag-doped Content on Antimicrobial Activity and Substrate Color of Chromium Thin Films Deposited by DC Magnetron Sputtering

Investigation of Properties of the Zr,Hf-(Zr,Hf)N-(Zr,Hf,Me,Al)N Coatings, Where Me Means Cr, Ti, or Mo

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