2020
DOI: 10.1016/j.vacuum.2020.109766
|View full text |Cite
|
Sign up to set email alerts
|

The effect of thickness on surface structure of rf sputtered TiO2 thin films by XPS, SEM/EDS, AFM and SAM

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

2
18
0

Year Published

2021
2021
2022
2022

Publication Types

Select...
10

Relationship

1
9

Authors

Journals

citations
Cited by 81 publications
(30 citation statements)
references
References 55 publications
2
18
0
Order By: Relevance
“…The values in this table reveal that, the appearance of surface, in all cases, is similar and quite homogeneous, having a roughness which seems to be independent of the layer thickness. It means that this method of fabrication would allow using even thicker layers without a modification in the surface roughness, which is an important factor that influences the physical behaviour of TiO 2 -based thin films [ 57 ].…”
Section: Resultsmentioning
confidence: 99%
“…The values in this table reveal that, the appearance of surface, in all cases, is similar and quite homogeneous, having a roughness which seems to be independent of the layer thickness. It means that this method of fabrication would allow using even thicker layers without a modification in the surface roughness, which is an important factor that influences the physical behaviour of TiO 2 -based thin films [ 57 ].…”
Section: Resultsmentioning
confidence: 99%
“…The energy difference (spin–orbit splitting) between these peaks is 5.7 eV, which is in good agreement with the TiO 2 nanoparticles' standard value. 31–33 In Fig. 2C, the XPS spectra of O 1s were split into two peaks at 529.5 eV and 531.2 eV, corresponding to Ti–O–Ti and Ti–O–H, respectively.…”
Section: Resultsmentioning
confidence: 99%
“…The structure of the carbon skeleton is demonstrated by the bond between C–C/C–H with the energy of 284.78 eV. Except for the substrate grown catalyst, a little of the signals of adjacent to the C1s peak maybe comes from carbon contamination as the sample exposing to air [ 29 ].…”
Section: Resultsmentioning
confidence: 99%