The effect of target material concentration on EUV near 6.7 nm and out-of-band radiation of laser-produced Gd plasma

Zhang, Yibin; Dou, Yinping; Xie, Zhuo; Zhang, Qijin; Wen, Zhilin; Wang, Chaohui; Yin, Weihao; Song, Xiaowei; Gao, Xun; Lin, Jingquan

doi:10.1016/j.vacuum.2024.113607

Vacuum

2024

DOI: 10.1016/j.vacuum.2024.113607

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The effect of target material concentration on EUV near 6.7 nm and out-of-band radiation of laser-produced Gd plasma

Yibin Zhang,

Yinping Dou,

Zhuo Xie

et al.

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The effect of target material concentration on EUV near 6.7 nm and out-of-band radiation of laser-produced Gd plasma

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References 17 publications

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