An investigation of the adsorbed phase on anodic and thermally grown tantalum oxide on sputtered tantalum has been carried out using infrared reflectance and transmission spectral techniques. After exposure to air (50% RH), it was possible to identify water, carbon dioxide, and hydrocarbon residues. Both the water and carbon dioxide were removed on evacuation and heating while the hydrocarbon residues were retained by the sample. It is proposed that the hydrocarbon residues occur as a result of gettering processes in the residual gases during sputtering of the original tantalum film, or by incorporation of the organic electrolyte used for anodizing.The infrared spectrum of a solid can be a very helpful tool in characterizing the nature and existence of adsorbed phases on solids (1). Under appropriate conditions it has been used to determine adsorption isotherms (1-4), and to establish the nature of an adsorbent (5, 6) and the type of interaction between adsorbent-adsorbate (3, 4). Further, it is known that the presence of an adsorbed phase on a solid can have a pronounced effect on the electrical properties of both the bulk and the surface of a solid (7-14). As a particular example, it is known that the presence of an adsorbed layer of water can have a decided effect on the dielectric properties of many oxides (15, 16) as anodic aluminum oxide (17) and anodic tantalum oxide (18). Further, based on charge storage data for tantalum oxide it may be possible that the presence of a second adsorbate may be necessary to explain the pronounced effect at present attributed only to water (18). In order to characterize the various species on tantalum oxide the infrared spectrum of the adsorbate phase was obtained.It was possible to obtain the spectrum of the adsorbed phase in the 2.5-13~ range without undue complications due to the fact that tantalum oxide presents no interfering band in this region of the spectrum (19). Although techniques are directly available for observing the spectrum of an adsorbed phase on a solid, the particular case of tantalum oxide offers a number of singular peculiarities which required an evaluation of preparative and observational techniques. These factors were evaluated by preparing tantalum oxide by both thermal oxidation and anodization on several different kinds of substrates. Further, spectra were observed by more than one method, including specular reflectance, multiple reflectance, and direct transmission. In this way it was possible to rule out spurious results and to make definite assignments to adsorbate materials. Of the techniques employed it is felt that the method of direct transmission proved the more useful and flexible.
ExperimentalTantalum oxide films were used to evaluate the reflectance method. These samples were prepared by deposition of tantalum on 1 x 3 in. quartz microscope slides. The slides were first cleaned in detergent and rinsed in distilled water and isopropyl alcohol. Tantalum was then deposited by cathodic sputtering at 4 kv and 3 ma/cm 2 from an arc melted tan...