The effect of SrTiO3 seed and application of in-situ magnetic field on the preparation of Pb(Zr, Ti)O3 thin film by pulsed laser deposition

Abstract

Pb(Zr,Ti)0 3 thin film was prepared on SrTi0 3 /Pt/Ce0 2 /Si0 2 /Si substrate by pulsed laser deposition with in-situ magnetic field (Dynamic Aurora PLD method). SrTi0 3 and Ce0 2 layers were also prepared by this method, and Pt layer (bottom electrode was prepared by rf magnetron sputtering). Dynamic Aurora PLD method enabled to lower crystallization temperature for Ce0 2 (below 300 'C, even at room temperature), SrTi0 3 (400 'C) as well as PZT (400 'C). Ce0 2 layer was used to improve the crystallinity ofPt bottom electrode. SrTi0 3 layer was used as a seed layer to help the crystallization of PZT. In case of Ce02, amorphous film was obtained without application of magnetic field. This indicates that application of magnetic field has the key to lower the crystallization temperature. Under 2000 G of magnetic field, clear Ce0 2 (111) peak was observed. For SrTi0 3 , it was also found that the crystallinity of SrTi0 3 changes with the atmosphere during deposition; the crystallinity is not necessarily high in 0 2 atmosphere and the crystallinity was high in N20 atmosphere. Similar effect was also observed on the preparation of PZT thin film. Since it is known that N 2 0 decomposes into N2 and atomic oxygen, and the atomic oxygen is very active. Therefore, application of magnetic field in the N 2 0 atmosphere would enhance the formation of atomic oxygen to lower crystallization temperature of SrTi0 3 and PZT thin films.