2012
DOI: 10.1364/oe.20.022208
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The effect of silicon loss and fabrication tolerance on spectral properties of porous silicon Fabry-Perot cavities in sensing applications

Abstract: In this paper, we investigate the effect of non-uniformities (enlargement of current passage, non-equal surface current densities, etc.) in axial as well as transverse directions of a porous silicon Fabry-Perot (FP) cavity as well as loss nature of bulk silicon on spectral properties of this cavity, even that cavity is created with an anisotropic etching process. Without correct and comprehensive characterization of such cavities by incorporating these non-uniformities and inherent lossy nature of a cavity, de… Show more

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Cited by 27 publications
(11 citation statements)
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“…(3). The effects of redshift and blueshift of a resonance frequency of the analyzed MM slabs are analogous to those of porous silicon structures by adsorption of biological/ chemical molecules [28][29][30] and by the formation of silicon dioxide (silica) over the walls of pores in a porous silicon structure [53]. …”
Section: Cell Dimensions and Simulation Of S-parametersmentioning
confidence: 99%
See 1 more Smart Citation
“…(3). The effects of redshift and blueshift of a resonance frequency of the analyzed MM slabs are analogous to those of porous silicon structures by adsorption of biological/ chemical molecules [28][29][30] and by the formation of silicon dioxide (silica) over the walls of pores in a porous silicon structure [53]. …”
Section: Cell Dimensions and Simulation Of S-parametersmentioning
confidence: 99%
“…This effective medium approach is not unique to an analysis of MMs but also has been successfully applied to many research fields including porous silicon sensors [28][29][30].…”
Section: Introductionmentioning
confidence: 99%
“…The reflectance of resonance peak is about 24% and the full width at half maximum (FWHM) is 42 nm, where the quality factor ( Q = λ/Δλ) is 31.6. Compared to various other PS-based photonic configuration structures [ 11 , 14 , 16 , 17 , 19 ], the PS double Bragg mirror structure has a wider reflectivity stop band and a deeper resonance dip, which means that such a sensor gives a high distinguishablity. In Figure 3 b, the width of the high-reflectivity stop band is about 624 nm and the reflectance is about 96%, with a resonance peak at 1336.0 nm in the measured reflectance spectrum of the double Bragg mirrors following the (n L1 n H1 ) 10 (n L2 n H2 ) 10 sequence.…”
Section: Resultsmentioning
confidence: 99%
“…Furthermore, there are transverse chemical etching and axial electrochemical etching in the process of electrochemical etching. The transverse chemical etching will destroy the homogeneity of the PS photonic crystal more during the PS layer formation when the process goes deeper [ 18 , 19 ]. Though the difference of the variation for both axial and transverse etching between alternative layers is not evident at first, with the increase of layers, the accumulated change will be large enough to affect the characteristics and spectral properties of PS photonic crystal.…”
Section: Introductionmentioning
confidence: 99%
“…For the analysis of cascaded networks, either of the two transfer matrix forms, namely, ABCD [25][26][27] or wave cascading matrix (WCM) [18][19][20][28][29][30] can be employed. Because the WCM form is more useful for treating two-port calibration problems than the ABCD form, 28 in this paper, we will use the WCM form.…”
Section: B Propagation Constant Determinationmentioning
confidence: 99%