The Effect of Reactive Sputtering on the Microstructure of Parylene-C

Abstract

Sputtering technique involves the use of plasma that locally heats surfaces of substrates during the deposition of atoms or molecules. This modifies the microstructure by increasing crystallinity and the adhesive properties of the substrate. In this study, the effect of sputtering on the microstructure of parylene-C was investigated in an aluminum nitride (AlN)-rich plasma environment. The sputtering process was carried out for 30, 45, 90 and 120 min on a 5 μm thick parylene-C film. Topography and morphology analyses were conducted on the parylene-C/AlN bilayers. Based on the experimental data, the results showed that the crystallinity of parylene-C/AlN bilayers was increased after 30 min of sputtering and remained saturated for 120 min. A scratch-resistance test conducted on the bilayers depicted that a higher force is required to delaminate the bilayers on top of the substrate. Thus, the adhesion properties of parylene-C/AlN bilayers were improved on glass substrate by about 17% during the variation of sputtering time.

Modulating residual stress based on atomic layer deposition to enhance the adhesion of parylene C for encapsulation of flexible organic light-emitting diodes

“…Instead, it could be attributed to the growth of a layer of Al 2 O 3 on parylene C, which impedes the penetration of infrared radiation through the films. 24) It is noteworthy that in the growth of a layer of ALD-Al 2 O 3 film, the existing peaks were retained and no new peaks were detected. These results indicate that the O plasma and growth temperatures experienced by parylene C during the growth of ALD-Al 2 O 3 film are not sufficient to break the original bonds or form any new bonds in the film, ensuring that its original properties remain unchanged.…”

Application of Nanostructured Parylene‐C Films for Improved Optical Characteristics of Organic Light‐Emitting Diodes

“…[1,2] However, the inherent instability of organic materials when exposed to oxygen and moisture in air has prompted the development of various protective film techniques. [3][4][5][6] One of these technologies involves the use of a poly-monochloro-p-xylylene (parylene-C) coating, which is widely used as a conformal coating layer owing to its exceptional chemical resistance and gas barrier properties. [7][8][9][10] DOI: 10.1002/admi.…”