The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

Loui, Albert; Goericke, Fabian T.; Ratto, Timothy V.; Lee, Jungchul; Hart, Bradley R.; King, William P.

doi:10.1016/j.sna.2008.06.016

Cited by 65 publications

(50 citation statements)

References 23 publications

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“…On the other hand, the electrical and mechanical boundary conditions and their impact on the electro-mechanical response of the sensor was compared with the sensor (square cantileverdevice A) reported in Ref. 39. Under surface stress loading of a few milli N/m, the sensor model (device A) depicted change in its nominal resistance (∆R) in mΩ range that matches the experimental values.…”

Section: A Simulation Modelmentioning

confidence: 77%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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Over the years, piezoresistive nano cantilever sensors have been extensively investigated for various biological sensing applications. Piezoresistive cantilever sensor is a composite structure with different materials constituting its various layers. Design and modeling of such sensors become challenging since their response is governed by the interplay between their geometrical and constituent material parameters. Even though, piezoresistive nano cantilever biosensors have several advantages, they suffer from a limitation in the form of self-heating induced inaccuracy which is seldom considered in design stages. Although, a few simplified mathematical models have been reported which incorporate the self-heating effect, several assumptions made in the modeling stages result in inaccuracy in predicting sensor terminal response. In this paper, we model and investigate the effect of self-heating on the thermo-electro-mechanical response of piezoresistive cantilever sensors as a function of the relative geometries of the piezoresistor and the cantilever platform. Finite element method (FEM) based numerical computations are used to model the target-receptor interactions induced surface stress response in steady state and maximize the electrical sensitivity to thermal sensitivity ratio of the sensor. Simulation results show that the conduction mode of heat transfer is the dominant heat transfer mechanism. Furthermore, the isolation and immobilization layers play a critical role in determining the thermal sensitivity of the sensor. It is found that the shorter and wider cantilever platforms are more suitable to reduce self-heating induced inaccuracies. In addition, results depict that the piezoresistor width plays a more dominant role in determining the thermal drift induced inaccuracies compared to the piezoresistor length. It is found that for surface stress sensors at large piezoresistor width, the electrical sensitivity to thermal sensitivity ratio improves.

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Section: A Simulation Modelmentioning

confidence: 77%

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

Mathew

Sankar

2017

AIP Advances

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“…[Loui et al (2008), Su et al (1996), Saya et al (2005)] Additional designs or sections are proposed by some researchers to their fabricated device for the device protection according to the application purposes. Gel and Shimoyama (2004) have fabricated a protection head for their device to avoid the cantilever from easily being broken during handling as shown in Fig.…”

Section: Piezoresistive Mems Cantilever Designmentioning

confidence: 99%

High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)

Firdaus¹,

Omar²,

Azid³

2012

Finite Element Analysis - New Trends and Developments

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“…Both read out principles have a large potential, the static mode is most often used (as in this thesis) for its relative simplicity. Reported cantilever read out methods are on the basis of changes in capacitance [43,44,54], changes in the piezoresistivity [49,50,55], and optical beam deflection detected with a position sensitive detector, see for example reference [52,56]. These methods have a typical deflection resolution of at best ~1 pm.…”

Section: Cantilever-based Gas Sensorsmentioning

confidence: 99%

“…and a grating depth of 55 The fixed, varied and considered output parameters are given in Table 6.2; results are presented in Fig. 6.5.…”

Section: Device Optimizationmentioning

confidence: 99%

“…Microcantilever-based sensors, which have effectively been exploited for biological, chemical, and gas sensing applications, can be operated in either dynamic mode by monitoring the resonant frequency of the cantilever (CL), or static mode by measuring its stress-induced deflection, as the target binds to the functionalized surface of the CL [14,[132][133][134][135][136][137]. The deflection of the CL can be determined by means of bulky deflection of an optical beam [56] or electrical, i.e., capacitive, piezoresistive, or piezoelectric read-outs [43,54,55]. Alternatively, fully integrated optical read-out with a CL waveguide was firstly presented in 2006 by Zinoviev et al [138] and in the following three years by other groups [139][140][141][142].…”

Section: Introductionmentioning

confidence: 99%

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Integrated optical sensor utilizing slow-light propagation in grated-waveguide cavities

So¹

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The effect of piezoresistive microcantilever geometry on cantilever sensitivity during surface stress chemical sensing

Cited by 65 publications

References 23 publications

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

In silico modeling and investigation of self-heating effects in composite nano cantilever biosensors with integrated piezoresistors

High Sensitive Piezoresistive Cantilever MEMS Based Sensor by Introducing Stress Concentration Region (SCR)

Integrated optical sensor utilizing slow-light propagation in grated-waveguide cavities

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