The effect of nanoscratching direction on the plastic deformation and surface morphology of InP crystals

Huang, Jingyi; Ponce, Fernando; Caldas, P. G.; Prioli, R.; Almeida, C. M.

doi:10.1063/1.4833237

Cited by 6 publications

(3 citation statements)

References 31 publications

(36 reference statements)

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“…It is known that nanoscale lithography on semiconductors by indentation and by scratching stimulates the selective growth of local nanostructures (Fonseca Filho et al, 2010; Fonseca‐Filho et al, 2007; Hirai & Itoh, 2004; Hyon et al, 2000; Taylor et al, 2008), and it was noted that nucleation of nanocrystals occurs due to the presence of dislocation (Fonseca Filho et al, 2007). The defects created in the local microstructure of the crystal due to a lithography process have been widely studied by cross‐section transmission electron microscopy (Caldas et al, 2011; Huang, Ponce, Caldas, Prioli, & Almeida, 2013; Ponce et al, 2009). However, these reports did not analyze in depth what happens on the nanoscale surface of the crystal.…”

Section: Introductionmentioning

confidence: 99%

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Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope

Filho

Pires

Souza

et al. 2021

Microscopy Res & Technique

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In this work, the topographical effect of the scratching trajectory and the feed direction on the formation of lithographed lines on the (001) InP surface was investigated using an atomic force microscope (AFM) tip-based nanomachining approach.Nanoscratching tests were carried out using the sharp face of a diamond AFM tip in contact mode. From the topographic maps obtained by AFM, several morphological and fractal parameters were obtained and analyzed. Surface morphology presented a surface smoothing for surfaces with scratches produced in [011] and [001] directions.The height parameters confirmed this behavior because scratches in [001] direction exhibited lower roughness. Moreover, this scratch direction promoted the height distribution most symmetrical and platykurtic. The other morphological parameters revealed that this direction provided a more irregular surface (smaller S mc and S xp ), peak distribution, denser and pointed, smaller portion of material in the core, less deep furrows, higher spatial frequency components, and high isotropy. Fractal parameters revealed that FRE90 has the highest spatial complexity, it is dominated by higher spatial frequencies, and has the lowest surface percolation. Furthermore, all samples exhibited high topographic uniformity.

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Section: Introductionmentioning

confidence: 99%

“…The defects created in the local microstructure of the crystal due to a lithography process have been widely studied by cross-section transmission electron microscopy (Caldas et al, 2011;Huang, Ponce, Caldas, Prioli, & Almeida, 2013;Ponce et al, 2009). However, these reports did not analyze in depth what happens on the nanoscale surface of the crystal.…”

mentioning

confidence: 99%

Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope

Filho

Pires

Souza

et al. 2021

Microscopy Res & Technique

View full text Add to dashboard Cite

show abstract

“…Normal loads were applied using a cubecorner diamond tip with a radius of curvature smaller than 50 µm, allied with atomic force microscopy. This enabled observation of structural defects [8], together with analyses of applied force, scratch speed, temperature, friction coefficient, and scratch morphology [9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

Evaluation of Triboelectricity in Diamond-Like Coatings Containing Silver Nanoparticles Using Afm and KPFM

Vieira¹,

Maciel²,

Pessoa³

et al. 2014

ABM Proceedings

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Kelvin probe force microscopy (KPFM) can be used to monitor electrostatic charges on the surfaces of materials. In this paper, we describe the use of KPFM to evaluate the electrostatic effect induced by silver nanoparticles incorporated as clusters in diamond-like carbon (DLC) films, before and after scratching. The results are compared to those obtained for DLC films without silver nanoparticles. Raman spectroscopy was used to identify the DLC signature, and energy dispersive X-ray spectroscopy (EDX) was used to confirm the presence of silver in the film. The morphology of the DLC film containing silver was investigated using scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The findings suggest that the incorporation of silver nanoparticles in amorphous materials could offer new options for electrostatic energy storage on the surfaces of these materials.Ag surface were also observed, which could be attributed to charge transfer between separate silver clusters.

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Scratching of copper with rough surfaces conducted by diamond tip simulated using molecular dynamics

Fang

Liu

et al. 2014

Int J Adv Manuf Technol

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The effect of nanoscratching direction on the plastic deformation and surface morphology of InP crystals

Abstract: Effect of surface pretreatment and substrate orientation on the characteristics of InAs quantum dots on Si and Si O 2 substrates J. Vac. Sci. Technol. B 25, 945 (2007); 10.1116/1.2739568Comparative studies of the epireadiness of 4 in. InP substrates for molecular-beam epitaxy growth

Cited by 6 publications

References 31 publications

Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope

Investigation of the morphological and fractal behavior at nanoscale of patterning lines by scratching in an atomic force microscope

Evaluation of Triboelectricity in Diamond-Like Coatings Containing Silver Nanoparticles Using Afm and KPFM

Scratching of copper with rough surfaces conducted by diamond tip simulated using molecular dynamics

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