The effect of materials selection on metals reduction in propylene glycol methyl ether acetate, PGMEA

Entezarian, Majid; Geiger, Bob

doi:10.1117/12.2220044

Cited by 2 publications

(5 citation statements)

References 3 publications

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“…For some metals, the concentration is reduced which can be attributed to the nylon capability for adsorption of ionic species as reported before. [3] Table 1. The metal concentration in ppb after soaking 24 hours in PGMEA.…”

Section: Resultsmentioning

confidence: 99%

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Characterization of nylon membranes for nano-particle filtration

Entezarian,

Bellview,

Singh

2024

Advances in Patterning Materials and Processes XLI

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The purity of fluids exposed to a wafer is critical as the node sizes are approaching low single digit nanometers. The potential impurities could be solid or semi-solid particles, soluble metal cations, anions, organic species, or gases. All these need to be removed for optimum yield and minimal defects. The technical challenge associated with reducing the node sizes also relates to membranes production as membranes with low single digit pore sizes are needed to remove nanometer impurities. The interest in nylon membrane is twofold as it can mechanically remove fine particles as well as by its adsorptive capabilities. In this study, nylon membranes with pore sizes of 2, 5, 10, and 20 nm were characterized for microstructure, flow rate versus pressure drop, bubble point, and metal extractables in PGMEA.

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Section: Resultsmentioning

confidence: 99%

“…Nylon membrane has both amine and carboxyl functional groups on the surface which can absorb metals. The removal of the nanoparticles and metals [3] can be achieved using a nylon membrane rated to single digit pore size.…”

Section: Introductionmentioning

confidence: 99%

Characterization of nylon membranes for nano-particle filtration

Entezarian,

Bellview,

Singh

2024

Advances in Patterning Materials and Processes XLI

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“…To date, different polymeric membranes such as nylon, polyethylene, and polypropylene were used for the removal of various metal ions from PGMEA . Among the membranes tested, the nylon-based membranes exhibited higher removal efficiency for both trivalent and divalent metal ions; however, the membrane exhibited low removal efficiency toward the monovalent metal ions . Hence, media with excellent metal removal efficiency and high sorption capacity are still in high demand.…”

mentioning

confidence: 99%

“…Among these, PGMEA and PGME are predominantly used as solvents for photoresists and antireflective coatings. To purify these solvents, technologies such as ion exchange, reactive distillation, liquid–liquid extraction, adsorption, and membrane separation are presently employed. Among these technologies, membrane-based separation was found to present fewer operational challenges.…”

mentioning

confidence: 99%

“…For instance, compared with energy-intensive processes such as distillation and extraction, membrane-based separation is an easy process with less energy demand. To date, different polymeric membranes such as nylon, polyethylene, and polypropylene were used for the removal of various metal ions from PGMEA . Among the membranes tested, the nylon-based membranes exhibited higher removal efficiency for both trivalent and divalent metal ions; however, the membrane exhibited low removal efficiency toward the monovalent metal ions .…”

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confidence: 99%

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Metal Ions Removal from Organic Solvents using MXene-Based Membranes

Gnani Peer Mohamed,

Arabi Shamsabadi,

Kavousi

et al. 2023

ACS Appl. Eng. Mater.

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We investigated the applicability of membranes, prepared with Ti 3 C 2 T x MXene as the active layer, for metal ion removal from an organic solvent. The removal of various mixed metal ions from propylene glycol monomethyl ether acetate, commonly used in the microelectronics industry, was evaluated. The MXene membrane exhibited over 90% removal efficiency for metal ions such as Li, Ca, Cr, Fe, Ni, and Co and over 80% for metal ions such as Al, V, and Pb from a solution containing 17 metal ions. This result highlights the potential of MXene as an effective material for ion removal from organic solvents.

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The effect of materials selection on metals reduction in propylene glycol methyl ether acetate, PGMEA

Cited by 2 publications

References 3 publications

Characterization of nylon membranes for nano-particle filtration

Characterization of nylon membranes for nano-particle filtration

Metal Ions Removal from Organic Solvents using MXene-Based Membranes

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