2020
DOI: 10.1109/tps.2020.3003090
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The Effect of Key Parameters on Power Absorption in Helicon Plasma Sources

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Cited by 9 publications
(2 citation statements)
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“…Chi et al [37] found that the increase in pressure can reduce the power required for the mode transition. Fazelpour et al [38] explored the dominant role of different heating mechanisms at different neutral pressures. When the neutral pressure was high (>2 mTorr), the collision mechanism was dominant in the plasma due to the high plasma density [39].…”
Section: Introductionmentioning
confidence: 99%
“…Chi et al [37] found that the increase in pressure can reduce the power required for the mode transition. Fazelpour et al [38] explored the dominant role of different heating mechanisms at different neutral pressures. When the neutral pressure was high (>2 mTorr), the collision mechanism was dominant in the plasma due to the high plasma density [39].…”
Section: Introductionmentioning
confidence: 99%
“…Helicon plasma sources are widely used for many applications in various fields, such as semiconductor industries, plasma thrusters, scientific studies, due to their high ionisation efficiency and easy operation [1][2][3][4][5][6][7][8]. Helicon waves (HWs) have a frequency between the frequency of ion and electron cyclotrons, and its dispersion relationship reveals that the plasma density is proportional to axial wavenumbers [9].…”
Section: Introductionmentioning
confidence: 99%