2001
DOI: 10.1016/s0368-2048(01)00340-1
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The effect of ion energy on the chemistry of air-aged polymer films grown from the hyperthermal polyatomic ion Si2OMe5+

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Cited by 48 publications
(78 citation statements)
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References 26 publications
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“…However, comparison with calculations for hyperthermal ions [35] shows that this assumed sticking probability is probably an overestimation. This study showed a more realistic sticking probability of between 20 and 50%, and is dependent on the ion energy [37].…”
Section: Sticking Probabilitymentioning
confidence: 98%
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“…However, comparison with calculations for hyperthermal ions [35] shows that this assumed sticking probability is probably an overestimation. This study showed a more realistic sticking probability of between 20 and 50%, and is dependent on the ion energy [37].…”
Section: Sticking Probabilitymentioning
confidence: 98%
“…Thus, it was implied that ions provided energy to the surface through energetic collisions which enabled further reactions to occur [34], but their role in contributing mass to films was discounted. As discussed below, there is now growing experimental evidence to support ions playing a greater role in plasma polymer growth [35][36][37].…”
Section: Plasma Polymer Filmsmentioning
confidence: 99%
“…[153][154][155][156] The mechanism to explain these phenomena centred on the energies at which depositing species arrive at the surface of the substrate. Under low pressure, low power conditions commonly used for fabrication of functional polymer coatings, neutral species such as radicals and unfragmented precursor molecules reach the surface at nearly ambient temperature (0.03-0.05 eV).…”
Section: Controlling Plasma-assisted Surface Modificationmentioning
confidence: 99%
“…There exist a number of reports11, 17, 18, 21, 31 in the field of thin‐film deposition from silicon–organic monomers that have used XPS analysis for layer characterization. Unfortunately, none of these works discusses the internal layer ratios; only the material compositions are considered.…”
Section: Introductionmentioning
confidence: 99%