2016
DOI: 10.1149/2.0271609jss
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The Effect of Interface States on Single-Walled Carbon Nanotube Transistors

Abstract: Different from p-type single-walled carbon nanotubes (SWCNT) thin film transistors (TFTs) with SiO2 dielectrics, air-stable top-gated n-type SWCNT TFTs are reported with amorphous silicon nitride (SiNx) dielectrics exhibiting the strong dependence of deposition methods and conditions, and metal contacts. Amorphous silicon TFTs-like characteristics was observed from semiconducting single-chirality (6,5) SWCNT TFTs with SiNx deposited at 225°C and appropriate NH3/SiH4 feeding ratio of 10 sccm/5.3 sccm using plas… Show more

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Cited by 5 publications
(2 citation statements)
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“…For examples, we utilized Unaxis 790 PECVD for SiNx growth and found the best deposition parameters as shown in Table 1 with the flow rate of ammonium to silane in the ratio of 10 sccm/5.3 sccm. 3,6 Using the same flow rate of NH 3 to SiH 4 with STS PECVD, no current was detected, indicating the damage of carbon nanotube thin films. However, with the standard STS PECVD recipe ( Table 2), the fabricated carbon nanotube thin film transistors showing the similar characteristics as presented in Figure 5.…”
Section: Resultsmentioning
confidence: 99%
“…For examples, we utilized Unaxis 790 PECVD for SiNx growth and found the best deposition parameters as shown in Table 1 with the flow rate of ammonium to silane in the ratio of 10 sccm/5.3 sccm. 3,6 Using the same flow rate of NH 3 to SiH 4 with STS PECVD, no current was detected, indicating the damage of carbon nanotube thin films. However, with the standard STS PECVD recipe ( Table 2), the fabricated carbon nanotube thin film transistors showing the similar characteristics as presented in Figure 5.…”
Section: Resultsmentioning
confidence: 99%
“…They used the n-CNT TFTs in a driver circuit for an OLED display. Li used sputtered and PECVD grown SiN x thin films as gate dielectrics for CNTFETs on glass substrates [34]. The authors optimized the film deposition conditions and realized top-gated n-CNTFETs.…”
Section: Introductionmentioning
confidence: 99%