2017
DOI: 10.1016/j.jnoncrysol.2017.03.021
|View full text |Cite
|
Sign up to set email alerts
|

The effect of hydrogen addition in argon-acetylene plasma on the structure of amorphous carbon films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2018
2018
2024
2024

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 40 publications
0
2
0
Order By: Relevance
“…It should be also noted that the region 1100-1150 cm -1 and 1430-1470 cm -1 were related to the trans-polyacetylene segments at the grain boundaries [98]. The peaks ~1060 cm -1 and ~1180 cm -1 also have been reported for the nanocrystalline phase of carbon [99]. The sp 2-C phase or the G band (1560 cm -1 ) from the in-plane stretching mode of carbon is observed only when the deposition time is high at 30 s [100,101].…”
Section: Deposition On Si Substratesmentioning
confidence: 72%
“…It should be also noted that the region 1100-1150 cm -1 and 1430-1470 cm -1 were related to the trans-polyacetylene segments at the grain boundaries [98]. The peaks ~1060 cm -1 and ~1180 cm -1 also have been reported for the nanocrystalline phase of carbon [99]. The sp 2-C phase or the G band (1560 cm -1 ) from the in-plane stretching mode of carbon is observed only when the deposition time is high at 30 s [100,101].…”
Section: Deposition On Si Substratesmentioning
confidence: 72%
“…However, Ti-based ternary nitride coatings have shown low wear resistance, which has drawn attention to amorphous carbon coatings with low friction coefficients and chemical inertness [11][12][13]. The excellent properties of amorphous carbon coatings appear in the form of a mixture of hybrid bonds (e.g.…”
Section: Introductionmentioning
confidence: 99%