Abstract:<p>Aluminium nitride (AlN) is one of the leading piezoelectric materials for commercial bulk acoustic wave devices due to its useful properties such as moderate piezoelectricity, high acoustic velocities and low thermal drift. In this thesis, possibilities of strain generation or alloy formation in AlN thin films are investigated with the aim to further increase the piezoelectric response. To this end, helium and scandium ions are implanted in the AlN films at different concentrations. The changes in the… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.