The effect of FeNi-AlN layer thickness on the response of magnetic SAW sensor by FEM simulation
Do Duy Phu,
Hong Si Hoang,
Le Van Vinh
Abstract:In this study, we used simulation to investigate the optimal working point of a surface acoustic wave-magnetostriction sensor by varying the thickness of the magnetic sensitive layer using the finite elements method. We evaluated the sensor’s sensitivity by simulating the responses at the optimal point and changing the thickness of the magnetic sensitive layer (h3). Additionally, we reduced the piezoelectric substrate thickness (h1) at the optimal point to determine the limit point of the center frequency (f0)… Show more
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