Abstract:Microscale (<5μm) gas breakdown is usually dominated by field emission, which is influenced largely by electrode surface morphology. At present, there is a large number of studies on the breakdown and discharge of different metal electrode geometry and electrode spacing as well as MEMS device structures, but few studies on the breakdown of MEMS electrodes affected by notching, which will greatly change the electrode surface morphology but is difficult to completely avoid in DRIE process based on SOI wafer. … Show more
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