The effect of different annealing temperatures on the mechanical and tribological properties of the Ti2AlN MAX phase films
Muhammet Cakir,
Hikmet Cicek,
Semih Duran
et al.
Abstract:Ti2AlN MAX phase films produced at different N2 flow rates and different annealing temperatures were deposited on 52100 steel substrates using the closed-field unbalanced magnetron sputtering technique. N2 flow rates were changed to 2, 3.5, and 5 sccm. Due to the increasing N2 flow rate, film thickness decreased from 2 to 1.3 µm. Then the produced films were subjected to annealing at temperatures of 700, 750, and 800°C. After the film produced at a flow rate of 2 sccm was annealed at 750°C, the presence of the… Show more
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