The effect of curing history on the residual stress behavior of polyimide thin films

Chung, Hyunsoo; Joe, Yung-Il; Han, Haksoo

doi:10.1002/(sici)1097-4628(19991227)74:14<3287::aid-app1>3.0.co;2-w

Cited by 35 publications

(23 citation statements)

References 11 publications

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“…All PI films prepared in this study exhibit good transparency in the visible region, and no scattering of light was observed. Although some rigid‐structured PIs exhibit semi‐crystalline nature,7, 8, 14, 25–28 no peaks related to crystalline components are observed in the WAXD patterns for the present PI films as shown in Figure 2. The shoulder peaks observed around 2Θ = 20° are assigned to amorphous halos.…”

Section: Resultsmentioning

confidence: 74%

Coefficients of molecular packing and intrinsic birefringence of aromatic polyimides estimated using refractive indices and molecular polarizabilities

Terui

Ando

2004

J Polym Sci B Polym Phys

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Molecular structure dependences of the coefficients of molecular packing (Kp) and the intrinsic birefringence (Δn0) were investigated for aromatic polyimides (PIs) using a method based on the modified Lorentz–Lorenz equation and the Vuks equation. This method needs only average refractive indices and polarizability tensors ( ) for PI repeating units. αˆ was calculated using the density functional theory at the B3LYP/6‐31+G(d) theory level that was confirmed as optimal for PI repeating units. Because bent or kinked structures in main chain hinder the ordering of polymer chains, Kp decreases in cases that ether linkages are introduced in the main chain and that kinked‐structured dianhydrides are used. Introduction of side groups, trifluoromethyl (CF3) groups in particular, also causes decreases in Kp. On the other hand, the estimated values of Δn0 are proportional to the calculated anisotropy in αˆ (Δα/Vvdw), thus Δn0 can be well predicted by computation. The values of Δα/Vvdw are decreased not only by bent structures in the main chain (e.g., ether linkage), presence of side groups, but also by large fractions of imide rings in the polymer structures. The estimated values of Δn0 range from 0.338 to 0.470, which are much larger than the reported ones for optically transparent conventional polymers. © 2004 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 42: 2354–2366, 2004

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Section: Resultsmentioning

confidence: 74%

Coefficients of molecular packing and intrinsic birefringence of aromatic polyimides estimated using refractive indices and molecular polarizabilities

Terui

Ando

2004

J Polym Sci B Polym Phys

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“…Research conducted over the past decade has understood the importance of considering the polymer film morphological contributions to the residual stress as well as its moisture‐induced stress–relaxation behavior of polymer films 5, 17–20. Rigid polymers such as poly( p ‐phenylene pyromellitimide) (PMDA‐PDA) and poly( p ‐phenylene biphenyltetracaboximide) (BPDA‐PDA) showed high chain rigidities and orders with relatively low stress, which are highly required in the fabrication of microelectronic devices 21, 22.…”

Section: Introductionmentioning

confidence: 99%

Analysis of dimensionally stable copolyimide with a low-level residual stress

Chung

Jang

Hwang

et al. 2001

J. Polym. Sci. B Polym. Phys.

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“…Hence, the X‐ray diffraction patterns did not seem to be affected by the change in the more ordered ODA content. ODA has also been reported to impart amorphous morphology to polyimides 31, 34, 36…”

Section: Resultsmentioning

confidence: 99%

“…The residual stresses of the films were measured with a thin‐film stress analyzer 30–33. The curvatures of the Si wafers with and without films were measured at room temperature with a HeNe laser beam in the temperature range of 25–220 °C.…”

Section: Methodsmentioning

confidence: 99%

Synthesis and characterization of soluble polyimides containing trifluoromethyl groups in their backbone

Kim

Lee

Sundar

et al. 2004

J Polym Sci B Polym Phys

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A series of polyimides were synthesized from 2,2‐Bis(3,4‐dicarboxyphenyl)hexafluoropropane, 2,2‐bis(3‐amino‐4‐hydroxyphenyl)‐hexafluoropropane, and 4,4′‐oxydianiline by chemical imidization. The effects of the diamine ratios on the properties of the films were evaluated through the study of their thermal, electrical, and morphological properties. All the polymers exhibited better solubility in most of the organic solvents and hence were easily processable. Polyimides with more 2,2‐bis(3‐amino‐4‐hydroxyphenyl)‐hexafluoropropane exhibited better solubility and a low refractive index, which is highly desired for microelectronic applications. The dielectric constant and birefringence were strongly dependent on the fluorine content. With an increase in the fluorine substitution, both the dielectric constant and birefringence decreased. All the polymers exhibited high thermal stability (>400 °C). The absence of crystalline melting in differential scanning calorimetry and broad wide‐angle X‐ray diffraction patterns revealed the amorphous nature of the polymers, which was due to the presence of bulky CF3 groups and hinged ether linkages of the diamine component. The residual stress values decreased with an increase in the 4,4′‐oxydianiline content, and the results were in agreement with the dielectric constant. © 2004 Wiley Periodicals, Inc. J Polym Sci Part B: Polym Phys 42: 4303–4312, 2004

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The effect of curing history on the residual stress behavior of polyimide thin films

Cited by 35 publications

References 11 publications

Coefficients of molecular packing and intrinsic birefringence of aromatic polyimides estimated using refractive indices and molecular polarizabilities

Coefficients of molecular packing and intrinsic birefringence of aromatic polyimides estimated using refractive indices and molecular polarizabilities

Analysis of dimensionally stable copolyimide with a low-level residual stress

Synthesis and characterization of soluble polyimides containing trifluoromethyl groups in their backbone

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