2008
DOI: 10.1117/12.795735
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The effect of chamber size on collection efficiency and pattern in 3D electroosmosis chip

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“…The top electrode was made of Indium Tin Oxide (ITO) and the bottom electrode was patterned by lithography using Cr covered glass. The detail of the chip fabrication process can be found elsewhere [9,10]. Polystyrene latex beads with m µ 3 size (Sigma L0905) were used for particle collection.…”
Section: Fabrication and Numerical Simulation For Electoosmosis Flowmentioning
confidence: 99%
“…The top electrode was made of Indium Tin Oxide (ITO) and the bottom electrode was patterned by lithography using Cr covered glass. The detail of the chip fabrication process can be found elsewhere [9,10]. Polystyrene latex beads with m µ 3 size (Sigma L0905) were used for particle collection.…”
Section: Fabrication and Numerical Simulation For Electoosmosis Flowmentioning
confidence: 99%