The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface

It is proposed to use “liquid glasses” of different compositions as substrates for space-based X-ray optical elements. One of the main requirements for such materials is the smallest mass and the possibility of surface treatment. Special requirements are imposed on the surface roughness, which must be less than 1 nm, and the shape accuracy should be at the level of units of nanometers. It is proposed to use a class of compounds based on alkali metal silicates or strong organic bases as a material, which allows forming the required shape and roughness, as well as providing subsequent treatment. The effect of smoothing the surface roughness of liquid glasses of three different compositions deposited on chromium and nickel films has been studied. Before and after the deposition of the structures, the roughness of all surfaces has been studied using an atomic force microscope. The roughness has been calculated using the power spectral density function (PSD function). The structures deposited on the surface, were irradiated with accelerated argon ions with an energy of 800 eV. The etch depth and effective roughness have been measured. One of the studied compositions has demonstrated a satisfactory reduction in roughness and the stability of this effect during ion etching.

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The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface

Cited by 3 publications

References 13 publications

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