The Distribution Measurement of the Photo-induced Plasma in Semiconductor by Near-field Scanning Microwave Microscopy

Ma, Liao; Leng, Ning; Ye, Xiu Zhu; Jin, Ming; Bai, Ming

doi:10.1109/piers-fall48861.2019.9021849

Cited by 5 publications

(1 citation statement)

References 8 publications

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“…The core idea of the technology is to use a massless scattering "probe" to measure the electromagnetic field, replacing the probe transport mechanism with an ultra-fast scanning laser. The resolution of the imaging is affected by the arrangement of the plasma, which mainly depends on the diameter of the laser beam [34] and can be significantly smaller than the aperture of a conventional probe. In microwave bands, super resolution and ultra-fast imaging speed can be realized at the same time [28].…”

Section: A the Scanning Plasma Scattering Technologymentioning

confidence: 99%

High-Efficiency Diagnosis of Antenna Radiation Characteristics Based on Scanning Optic-Induced Plasma Scattering Technology

Leng

Jin

et al. 2023

IEEE Trans. Antennas Propagat.

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This paper presents an innovative quasi-real-time antenna near-field diagnosis method, by scanning a laser induced plasma on a silicon wafer and imaging the field with the synchronously produced scattered signals. Several approaches have been devised to adapt to the antenna diagnosis scenarios. By using the multilayer matching approach, the issue of multiple reflection disturbance between the aperture and silicon wafer is avoided, especially for large aperture antenna at high frequencies. The accuracy of near-field distribution is improved, and far-field patterns can be transformed directly. The experiment results of a Ka-band 20dB standard antenna agree well with the simulation results. Diagnosis of radiation states in the reactive near-field region is demonstrated, and the resonate modes of a 2.4 GHz WiFi patch antenna at different frequencies are clearly observed. The experiments of a TM01 mode antenna verify the full polarization diagnosis ability of the method, and the linear polarization component is measured with the help of a polarization grid. The demonstrated diagnosis method has the advantages of high efficiency, ultra-close measurement distance, super resolution, and provides a highly promising and widely available method for antenna diagnosis.

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Section: A the Scanning Plasma Scattering Technologymentioning

confidence: 99%