The dissolution of Na2O-MgO-CaO-SiO2 glass in aqueous HF solutions

Fabrication of multilayer systems combining microfluidic and microoptical elements for fluorescence detection

“…Half-spherical cavities with a radius ranging from a few micrometers to a few tens of micrometers were also visible after etching. It is likely that microbubbles, inclusions, or local chemical modifications [30] were at the root of these cavities. These were few in number and did not cause any problems for the etching of the microfluidic network.…”

Morphological relaxation of glass surfaces

“…The aim of the etching procedure was to form two-dimensional profiles that can be described as ridges and valleys of varying width and a height (or depth) of about 0.5 pm. Originally, the etching procedure was as follows [8]:…”

Acid polishing of lead glass

“…To our knowledge, there has not been an experimental study of multicomponent glasses where different types of etchant are required. An observation related to the work in this paper is that etching of a smooth surface (for example, one which has been mechanically polished) causes it to develop cusp like features [1,3], thus roughening it slightly. The height of such features is found to be normally distributed [11].…”

“…These studies are primarily concerned with the measurement of etching rates [2] and how these are related to different etchant and glass compositions [3,9,10]. It has been shown that etching rates of multicomponent glasses, where all the components dissolve in HF, have a non-trivial dependence on both the 'bonding connectivity' of the glass and the presence of reaction by-products on its surface [10].…”

“…a wide variety of industrial applications, from the manufacture of integrated circuits to the fabrication of glass microfluidic devices [1][2][3][4]. Stevens [5] gives a qualitative description of etching in the context of tool design, masks for television tubes and fine structures in microelectronics.…”