The Design of Nanoscale 3D Precision Displacement System

Abstract

A large travel nanoscale 3D precision displacement system is designed with a two-stage coarse-fine driving pattern. Its coarse driving is completed by PID adaptive controller that controls the servo motor and precise ball screw to drive a 1D table, and the fine driving is realized by PZT (piezoelectric microdisplacement actuator). Program control method is adopted to realize the matching of micrometer and nanometer lever driving. A traceable measuring system based on MIP (the Michelson Interference principle) is designed and used to detect positioning, which reduces the accumulated detection error. Experiments verify the effectiveness of the displacement system.