The Design of Micro Electrostatic Structure with Low Driving Voltage

Abstract

A new design of micro electrostatic actuator with low driving voltage is presented in this paper. It can reduce the operation voltage effectively without decreasing the gap between electrodes. In the proposed actuator with low driving voltage, the fixed electrode was designed as a stepped structure to divide the driving process into two steps. The peripheral electrode and inner electrode will be closed one by one. The two step pull-in processes will lower the actuation voltage significantly. According to the current calculation, the new structure with low driving voltage can reduce the actuate voltage significantly.