The Design of a Fully Differential Capacitive Pressure Sensor with Unbalanced Parasitic Input Capacitances in 130nm CMOS Technology

Abstract

A switched capacitor amplifier for measuring absolute pressure with a micro-machined capacitive pressure sensor using correlated double sampling has been designed in 130nm CMOS technology. The switched capacitor amplifier design uses a combination of correlated double sampling, input offset cancellation, and output offset cancellation to help reject 1 f noise and DC offset mismatch. A method for sizing the operational transconductance amplifier (OTA) components according to the system noise, accuracy, and bandwidth requirements is presented. 2. For the output swing, if V DD is the maximum output voltage level, V out pp = 2 V DD , and the