The Contribution of Radiation and Viscous Loss in a Fluid Loaded Flexural Plate Wave Sensor

Dohner, Jeffrey L.

doi:10.1006/jsvi.1998.1729

Cited by 2 publications

(5 citation statements)

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“…where ρ f is the density perturbation of fluid. The solution of the fluid velocity field can be expressed as a sum of an irrotational vector field, obtained by means of the gradient of a scalar potential, and a solenoidal vector field, obtained by a vector potential [26,29,32].…”

Section: Theoretical Model (A) Equations For Quiescent Compressible Vmentioning

confidence: 99%

“…It is proved that, both theoretically and experimentally, acoustic radiation contributes the dominant damping of fluid-loaded microplates. The viscous damping is negligible when the fluid viscosity is lower than 10 cP, whereas for the microcantilevers it had been shown that the damping is mainly induced by the viscous dissipation of fluid [6,26]. It demonstrates that microplates are more resistive to the fluid viscosity and exhibit better sensitivity than the microcantilever sensing elements in the application of microelectromechanical systems-based mass sensing devices.…”

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

“…More recently, some researchers analysed the viscous effects of fluid-loaded plate-like structures [21,26,27]. Dohner [26] and Sorokin & Chubinskij [27] proposed a two-dimensional closed-form analytical model on the vibration of a plate in a viscous fluid, respectively. Dohner analysed the damping mechanism of an air-loaded SiN plate, and he found that it is viscous relaxation rather than sound radiation that dominates the damping of an air-loaded SiN plate.…”

Section: Introductionmentioning

confidence: 99%

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Dynamic analysis of submerged microscale plates: the effects of acoustic radiation and viscous dissipation

2016

Proc. R. Soc. A.

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The aim of this paper is to study the dynamic characteristics of micromechanical rectangular plates used as sensing elements in a viscous compressible fluid. A novel modelling procedure for the plate-fluid interaction problem is developed on the basis of linearized Navier-Stokes equations and no-slip conditions. Analytical expression for the fluid-loading impedance is obtained using a double Fourier transform approach. This modelling work provides us an analytical means to study the effects of inertial loading, acoustic radiation and viscous dissipation of the fluid acting on the vibration of microplates. The numerical simulation is conducted on microplates with different boundary conditions and fluids with different viscosities. The simulation results reveal that the acoustic radiation dominates the damping mechanism of the submerged microplates. It is also proved that microplates offer better sensitivities (Q-factors) than the conventional beam type microcantilevers being mass sensing platforms in a viscous fluid environment. The frequency response features of microplates under highly viscous fluid loading are studied using the present model. The dynamics of the microplates with all edges clamped are less influenced by the highly viscous dissipation of the fluid than the microplates with other types of boundary conditions.

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Section: Theoretical Model (A) Equations For Quiescent Compressible Vmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Dynamic analysis of submerged microscale plates: the effects of acoustic radiation and viscous dissipation

2016

Proc. R. Soc. A.

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“…Neglecting edge effects, [Wenzel, 1982] solved for the coupling between the plate and fluid in closed form. Later, [Dohner, 1998] expanded upon Wenzel's analytical work by including edge effects. He was able to show that a fluid/structure resonance occurs near to coincidence.…”

Section: Micro-torsional Disk Experimentsmentioning

confidence: 99%

Computational and experimental techniques for coupled acoustic/structure interactions.

Sumali¹,

Pierson²,

Walsh³

et al. 2004

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This report documents the results obtained during a one-year Laboratory Directed Research and Development (LDRD) initiative aimed at investigating coupled structural acoustic interactions by means of algorithm development and experiment. Finite element acoustic formulations have been developed based on fluid velocity potential and fluid displacement. Domain decomposition and diagonal scaling preconditioners were investigated for parallel implementation. A formulation that includes fluid viscosity and that can simulate both pressure and shear waves in fluid was developed. An acoustic wave tube was built, tested, and shown to be an effective means of testing acoustic loading on simple test structures. The tube is capable of creating a semi-infinite acoustic field due to nonreflecting acoustic termination at one end. In addition, a micro-torsional disk was created and tested for the purposes of investigating acoustic shear wave damping in microstructures, and the slip boundary conditions that occur along the wet interface when the Knudsen number becomes sufficiently large. 4

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The Contribution of Radiation and Viscous Loss in a Fluid Loaded Flexural Plate Wave Sensor

Cited by 2 publications

References 0 publications

Dynamic analysis of submerged microscale plates: the effects of acoustic radiation and viscous dissipation

Dynamic analysis of submerged microscale plates: the effects of acoustic radiation and viscous dissipation

Computational and experimental techniques for coupled acoustic/structure interactions.

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