The computation of electrostatic forces in MEMS: spatial method vs. material method

Zeng, Kaiping; Korvink, Jan G.

doi:10.1109/esime.2005.1502801

EuroSimE 2005. Proceedings of the 6th International Conference on Thermal, Mechanial and Multi-Physics Simulation and Experimen

DOI: 10.1109/esime.2005.1502801

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The computation of electrostatic forces in MEMS: spatial method vs. material method

Kaiping Zeng

Jan G. Korvink²

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The computation of electrostatic forces in MEMS: spatial method vs. material method

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References 6 publications

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