The composited high reflectivity p-type electrodes with patterned ITO for AlGaN-based ultraviolet light emitting diodes
J. Lang,
F. J. Xu,
J. M. Wang
et al.
Abstract:Composited p-type electrodes with high reflectivity have been investigated in AlGaN-based ultraviolet light emitting diodes (UV-LEDs) to improve the light extraction efficiency, which are composed of a patterned ITO layer and an Al reflector. It is verified that the patterned ITO with a thickness of 30 nm can not only well form Ohmic contact with p-GaN capping layer, but also be nearly 90% transparent to ultraviolet light, and thus presenting a reflectivity of 73% at 280 nm when combined with an Al reflector. … Show more
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