Microbeam and Nanobeam Analysis 1996
DOI: 10.1007/978-3-7091-6555-3_51
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The Check of the Elastic Scattering Model in Monte-Carlo Simulation

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“…We will show some comparison with experiments because also very simple models gave relatively reasonable results, even though the electron number for simulation was relatively low. We simulated the transport of electrons of energy 10, 20, 50 and 100 keV through the thin film of C, Al, Cu and Au with thickness 20-10000 nm (Starý, 1996). The calculated data were compared with experimental values (Cosslett & Thomas, 1964a, 1964b, 1965, (Reimer et al, 1978); we evaluated -electron backscattering coefficient, -angular distribution of transmitted electrons, -energy distribution of transmitted electrons.…”
Section: Electron Transmission Through the Thin Samplesmentioning
confidence: 99%
“…We will show some comparison with experiments because also very simple models gave relatively reasonable results, even though the electron number for simulation was relatively low. We simulated the transport of electrons of energy 10, 20, 50 and 100 keV through the thin film of C, Al, Cu and Au with thickness 20-10000 nm (Starý, 1996). The calculated data were compared with experimental values (Cosslett & Thomas, 1964a, 1964b, 1965, (Reimer et al, 1978); we evaluated -electron backscattering coefficient, -angular distribution of transmitted electrons, -energy distribution of transmitted electrons.…”
Section: Electron Transmission Through the Thin Samplesmentioning
confidence: 99%