The characterization of titanium nitride by x-ray photoelectron spectroscopy and Rutherford backscattering

Abstract

X-ray photoelectron spectroscopy (XPS) spectra have been obtained for TiNx, with x=0.25, 0.50, and 1.0, as determined by Rutherford backscattering (RBS) analyses, and with no detectable oxygen content. We find the shape of the Ti 2p transition to be strongly dependent upon the nitrogen content, and interpret the spectrum as a mixture of Ti and TiN. TiN1.0 samples with varying oxygen content were also examined, and the oxygen content serves to increase the background step in the Ti 2p transition. Angle resolved measurements indicate that the inelastic scattering due to oxygen is superimposed over an intrinsic satellite structure in the Ti 2p transition. Atom ratios, N/Ti, cannot be accurately determined by XPS without standardization. The binding energy of the Ti 2p3/2 transition occurs at 454.5 eV and the N 1s transition occurs at 396.7 eV. The oxygen that is present in TiN at concentrations up to 12 at. % is most likely bound to Ti as TiO rather than TiO2. Valence band measurements agree well with previous reports.

Bone Response to Surface-Modified Titanium Implants: Studies on the Early Tissue Response to Implants with Different Surface Characteristics

“…The binding energy of the XPS O 1s signal indicated that most if not all of the oxygen was bound to carbon, that is, in organic molecules adsorbed on the very surface from air exposure. However, the formation of a small amount of titanium oxide (or oxygen dissolved in the nitride) cannot be excluded [34–36]. The presence of large amounts of nitrogen in the form of a titanium nitride constitutes a markedly different surface chemistry compared to the other groups.…”

Structural defects and electronic structure of N-ion implanted TiO 2 : Bulk versus thin film

“…On the other hand, XPS VB of ion-implanted ceramic sample prepared at higher fluence shows the presence of additional features: the subbands located at ∼16 and 0.5 eV. The energy position of these features is close to those of TiN x [19] and can be attributed to N 2s and Ti 3d-subbands. (Fig.…”

Multilayer conformal coating of highly dense Multi-Walled Carbon Nanotubes bundles

“…This effect can be related to the presence of oxidized titanium, created by the exposure of the sample to air, after that the wafer is removed from the reactor. The Ti 2p peak typical of TiN [17] is clearly present at 455 eV (Fig. 6), and a shoulder centered around 458 eV is present as well.…”